Plasma Cleaner

Plasma
Cleaning

Plasma Cleaner

Plasma is generated in vacuum by our original technology

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Surface Reforming Device DTS-01

Features

  • NEPS/high frequency, microwave are not used
  • Large-capacity batch type low-temperature dry machine
  • Oxygen radical chemical reaction prevents the sample from being charged and allows it to be processed at room temperature
  • Improves wettability and hydrophilicity before film formation and application
  • It can be used widely as a test research and mass production equipment

Specifications

ModelDTS-01
Control SystemSequencer Control
External DimensionsW1000 x D1000 x H1540(mm) 400Kg
Chamber MaterialAluminum
Chamber SizeInternal Dimensions W600 x D620 x H250(mm)
React GasN₂ O₂ Ar Air
Vacuum PumpDry Pump 1000L/min 50/60Hz
Emergency StopPush Type
Power3Φ AC 200V±5% 50/60Hz 20A
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NOTIFICATION